Episode 1: Reticle control of semiconductors and electronic components

The situation now exists that there is a growing trend to use localised clean environments as clean rooms and as a result, pod conveyor systems are becoming recognised as necessary for reticle conveyance. This is an area in which particles are a major concern and the problem is how to make pod control more stable and efficient.

In response to custom LSI, greater numbers of reticles are therefore used and effective control has become an important issue, and it would be an advantage if when stored in pods they could be identified from outside.

The solution is simple, mark the product with 2-dimensional codes then read the codes when they come in or out of the stepper by mounting ID tags to the pods that contain the reticles. This means when they come out of the stepper the relevant information can be written to the ID tag mounted to the pod.

There are three major benefits to this system, first the internal reticle can be checked and identified by reading the information in the ID tag mounted to the pod. This means that data exchange via communications between the stepper and the stocker is unnecessary and allows effective control with a relatively simple system. Second the physical objects (the pods) and information (reticle ID) can be handled together and so there are no tracking errors. Then thirdly the use of two-dimensional code for reticle ID makes it possible to control reticles individually.

In this particular system the important model features are the two-dimensional code reader that allows the use of a compact, space-saving Camera. The settings for reading 2-dimensional codes can be performed easily using the simple teaching function. Already the compact (3.9 dia. × 25 mm) V700-D23P41-1 ID tags have a proven track record in carrier ID for 300-mm FOUP semiconductor systems. The design required a compact unit and so the V700-HMD11-1 reader/writer can be installed in locations with tight space restrictions.

Micromech is the systems integrator for Omron RFID systems, if you wish to find out more contact Stirling Morley on 01376 333311 or stirling@micromech.co.uk

'Micromech, keeping track with Omron'